JPS62134231U - - Google Patents
Info
- Publication number
- JPS62134231U JPS62134231U JP2096086U JP2096086U JPS62134231U JP S62134231 U JPS62134231 U JP S62134231U JP 2096086 U JP2096086 U JP 2096086U JP 2096086 U JP2096086 U JP 2096086U JP S62134231 U JPS62134231 U JP S62134231U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage device
- wafers
- storing
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000001816 cooling Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Devices That Are Associated With Refrigeration Equipment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2096086U JPS62134231U (en]) | 1986-02-18 | 1986-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2096086U JPS62134231U (en]) | 1986-02-18 | 1986-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134231U true JPS62134231U (en]) | 1987-08-24 |
Family
ID=30816957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2096086U Pending JPS62134231U (en]) | 1986-02-18 | 1986-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134231U (en]) |
-
1986
- 1986-02-18 JP JP2096086U patent/JPS62134231U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| USD260237S (en) | Semiconductor wafer container | |
| JPS62134231U (en]) | ||
| JPS58103523U (ja) | コンセント用保護カバ− | |
| JPH02106832U (en]) | ||
| JPS61205989U (en]) | ||
| JPS62193732U (en]) | ||
| JPS61175239U (en]) | ||
| JPS62199951U (en]) | ||
| JPS60169900U (ja) | 半導体装置輸送用トレイ | |
| JPS62159657U (en]) | ||
| JPH0234197U (en]) | ||
| JPS63153904U (en]) | ||
| JPS6159345U (en]) | ||
| JPS62159656U (en]) | ||
| JPS62109010U (en]) | ||
| JPS63144953U (en]) | ||
| JPH0256187U (en]) | ||
| JPS6292646U (en]) | ||
| JPS6360475U (en]) | ||
| JPS62116858U (en]) | ||
| JPH0266985U (en]) | ||
| JPS6268791U (en]) | ||
| JPH02125341U (en]) | ||
| JPH0184436U (en]) | ||
| JPS61125211U (en]) |